Quartz wafer carriers (also called quartz boats) securely hold, support, and transfer silicon wafers through high-temperature processes such as diffusion, thermal oxidation, annealing, and chemical vapor deposition (CVD).
High-purity quartz provides excellent thermal shock resistance, maintains mechanical stability at temperatures exceeding 1100°C, and minimizes metal ion contamination, ensuring high wafer yields and process purity.
Quartz carriers are engineered to fit industry-standard wafer diameters (including 2", 3", 4", 6", 8", and 12") and can be customized with standard 25-slot or 50-slot capacities or tailored spacing depending on furnace specifications.
The low coefficient of thermal expansion in quartz prevents deformation and thermal stress during rapid heating and cooling cycles, maintaining strict slot pitch tolerances and preventing wafer warping or slippage.
Standard maintenance involves ultrasonic cleaning with high-purity deionized (DI) water and semiconductor-grade acid etching (such as diluted hydrofluoric acid) inside cleanrooms to remove organic and chemical residues without degrading the quartz surface.